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2 — Particle Specification for Grade 20/0
The intent of this Standard is to facilitate the integration of ISEM equipment into an automated (semiconductor fabrication) factory
SEMI M79-0211 (first published)
SemI D67-0819 (technical revision)
The scope of this Document covers grades of 1
F07800 - SEMI F78 - Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications StdPbc-1115 2 — Particle Specification for1 Purpose 1. 1 The purpose of this Practice is to provide procedures for welding stainless steels and other corrosion resistant metals and alloys (CRAs) for fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. Welds performed following these procedures are of sufficient quality to provide the required system purity, weld integrity, and weld strength for use in semiconductor manufacturing applications. 2 Scope 2. 1
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